Vacuum pump which used manufacture vacuum， is the key equipment of RH vacuum finery， vacuum pump injection vacuum by steam. High-quality steam mixed with the saturated steam which produced by converter， the steam pressure and superheat satisfied vacuum pump were required， used for vacuum pump of finery. But there waste energy and instability in this way. So we used the steam superheating system substitute mixing system， the steam superheating system is used high temperature flue gas which generated by the fuel combustion， to heat the saturated steam which produced by converter， thereby the saturated steam satified finery vacuum pump required， the operation cost of steam superheating system than the mixing system savings of 3 300 000 yuan/a.